{"id":27813,"date":"2019-09-26T10:05:56","date_gmt":"2019-09-26T07:05:56","guid":{"rendered":"http:\/\/ihcoedu.uobaghdad.edu.iq\/?p=27813"},"modified":"2019-09-29T09:38:40","modified_gmt":"2019-09-29T06:38:40","slug":"%d9%82%d8%b3%d9%85-%d8%a7%d9%84%d9%81%d9%8a%d8%b2%d9%8a%d8%a7%d8%a1-%d9%8a%d9%86%d8%a7%d9%82%d8%b4-%d8%a7%d8%b7%d8%b1%d9%88%d8%ad%d8%a9-%d8%af%d9%83%d8%aa%d9%88%d8%b1%d8%a7%d9%87-%d8%aa%d8%a8%d8%ad","status":"publish","type":"post","link":"https:\/\/ihcoedu.uobaghdad.edu.iq\/?p=27813","title":{"rendered":"\u0642\u0633\u0645 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0621 \u064a\u0646\u0627\u0642\u0634 \u0627\u0637\u0631\u0648\u062d\u0629 \u062f\u0643\u062a\u0648\u0631\u0627\u0647 \u062a\u0628\u062d\u062b \u0641\u064a \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0627\u0644\u062a\u0631\u0630\u064a\u0630 \u0628\u0627\u0644\u062a\u0631\u062f\u062f \u0627\u0644\u0631\u0627\u062f\u064a\u0648\u064a \u0641\u064a\u00a0 \u062f\u0631\u0627\u0633\u0629 \u0627\u0644\u062a\u0631\u0643\u064a\u0628 \u0627\u0644\u0646\u0627\u0646\u0648\u064a \u0644\u0640 (TiO2)"},"content":{"rendered":"

<\/h4>\n

<\/h4>\n

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\"\"<\/p>\n

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 <\/p>\n

\"\"<\/span><\/h4>\n

\u0648\u064a\u0647\u062f\u0641 \u0627\u0644\u0628\u062d\u062b\u00a0 \u0627\u0644\u0649 \u062a\u0635\u0646\u064a\u0639 \u0645\u062a\u062d\u0633\u0633 \u0644\u0644\u063a\u0627\u0632\u0627\u062a \u0645\u0646 \u0627\u063a\u0634\u064a\u0629 \u0631\u0642\u064a\u0642\u0629 \u0630\u0627\u062a \u062a\u0631\u0643\u064a\u0628 \u0646\u0627\u0646\u0648\u064a \u0645\u0646 \u0645\u0627\u062f\u0629 \u062b\u0646\u0627\u0626\u064a \u0627\u0648\u0643\u0633\u064a\u062f \u0627\u0644\u062a\u064a\u062a\u0627\u0646\u064a\u0648\u0645 (TiO2) \u0627\u0644\u0646\u0642\u064a \u0648\u0627\u0644\u0645\u0637\u0639\u0645 \u0628\u0627\u0644\u0645\u0646\u063a\u0646\u064a\u0632 \u0628\u0646\u0633\u0628 \u062a\u0637\u0639\u064a\u0645 \u0645\u062e\u062a\u0644\u0641\u0629 (3\u060c5\u060c7%) \u0648\u0639\u0644\u0649 \u0642\u0648\u0627\u0639\u062f \u0645\u062e\u062a\u0644\u0641\u0629 (\u0627\u0644\u0632\u062c\u0627\u062c\u060c \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646\u060c ITO) \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u062a\u0631\u0630\u064a\u0630 \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a \u0630\u064a \u0627\u0644\u062a\u0631\u062f\u062f \u0627\u0644\u0631\u0627\u062f\u064a\u0648\u064a (R.F.Magnetron Sputtering Technique) \u0627\u0630 \u062a\u0645 \u062f\u0631\u0627\u0633\u0629 \u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u062a\u0631\u0643\u064a\u0628\u064a\u0629\u060c \u0627\u0644\u0628\u0635\u0631\u064a\u0629\u060c \u0627\u0644\u0645\u0648\u0631\u0641\u0648\u0644\u0648\u062c\u064a\u0629\u060c \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u062a\u062d\u0633\u0633\u064a\u0629 \u0644\u0644\u0643\u0634\u0641 \u0639\u0646 \u063a\u0627\u0632\u064a \u0627\u0644\u0647\u064a\u062f\u0631\u0648\u062c\u064a\u0646 \u0648\u062b\u0646\u0627\u0626\u064a \u0627\u0648\u0643\u0633\u064a\u062f \u0627\u0644\u0643\u0627\u0631\u0628\u0648\u0646 .<\/span><\/h4>\n

\u00a0\u062a\u0645 \u0641\u064a \u0647\u0630\u0627 \u0627\u0644\u0628\u062d\u062b \u00a0\u062a\u062d\u0636\u064a\u0631 \u0623\u063a\u0634\u064a\u0629\u00a0 \u062b\u0646\u0627\u0626\u064a \u0627\u0648\u0643\u0633\u064a\u062f \u0627\u0644\u062a\u064a\u062a\u0627\u0646\u064a\u0648\u0645 (TiO2) \u0628\u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u062a\u0631\u0630\u064a\u0630 \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a \u0628\u0627\u0644\u0645\u0648\u062c\u0627\u062a \u0627\u0644\u0631\u0627\u062f\u064a\u0648\u064a\u0629 \u0639\u0644\u0649 \u0642\u0648\u0627\u0639\u062f \u0645\u062e\u062a\u0644\u0641\u0629 (\u0627\u0644\u0632\u062c\u0627\u062c ,ITO \u0648\u0627\u0644\u0633\u0644\u064a\u0643\u0648\u0646) \u0648\u0628\u0633\u0645\u0643 (nm250 \u00b110) \u0648\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0642\u0627\u0639\u062f\u0629oC \u00a0(100 ).\u00a0 \u0648\u0647\u0630\u0647 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u062a\u0645 \u062a\u0637\u0639\u064a\u0645\u0647\u0627 \u0628\u0627\u0644\u0645\u0646\u063a\u0646\u064a\u0632 (Mn) \u0628\u0646\u0633\u0628 (3, 5, 7)% \u00a0\u0648\u062a\u0644\u062f\u064a\u0646\u0647\u0627 \u0628\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u00a0oC(500 ,600) \u0648\u0644\u0645\u062f\u0629 \u0633\u0627\u0639\u0629 \u0641\u064a \u0641\u0631\u0646 \u0645\u0641\u0631\u063a \u0645\u0646 \u0627\u0644\u0647\u0648\u0627\u0621. \u0648\u062a\u0645\u062a \u062f\u0631\u0627\u0633\u0629 \u062e\u0648\u0627\u0635\u0647\u0627 \u0627\u0644\u062a\u0631\u0643\u064a\u0628\u064a\u0629 \u0648\u0627\u0644\u0628\u0635\u0631\u064a\u0629 \u0648\u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u062a\u062d\u0633\u0633\u064a\u0629 , \u0643\u0630\u0644\u0643 \u062a\u0645\u062a \u062f\u0631\u0627\u0633\u0629 \u0627\u0644\u062e\u0648\u0627\u0635 \u0627\u0644\u062a\u0631\u0643\u064a\u0628\u064a\u0629\u00a0 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0641\u062d\u0648\u0635\u0627\u062a XRD \u0648 SEM \u0648 AFM ,\u0623\u0638\u0647\u0631\u062a \u0646\u062a\u0627\u0626\u062c \u0642\u064a\u0627\u0633\u0627\u062a (XRD) \u0623\u0646 \u062c\u0645\u064a\u0640\u0639 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0645\u062d\u0636\u0651\u0631\u0629 \u00a0\u0642\u0628\u0644 \u0627\u0644\u062a\u0644\u062f\u064a\u0646 \u00a0\u0643\u0627\u0646\u062a \u0630\u0627\u062a \u062a\u0631\u0643\u064a\u0628 \u0639\u0634\u0648\u0627\u0626\u064a \u00a0\u0648 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0628\u0639\u062f \u0627\u0644\u062a\u0644\u062f\u064a\u0646 \u0628\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629\u00a0 \u00a0oC(600)\u060c \u0627\u0635\u0628\u062d\u062a \u0630\u0627\u062a \u062a\u0631\u0643\u064a\u0628 \u0645\u062a\u0639\u062f\u062f \u0627\u0644\u062a\u0628\u0644\u0648\u0631 \u0648\u0645\u0646 \u0627\u0644\u0646\u0648\u0639 \u0627\u0644\u0631\u0628\u0627\u0639\u064a \u0645\u0639 \u0647\u064a\u0645\u0646\u0629 \u0627\u0644\u0646\u0645\u0648 \u0628\u0627\u0644\u0625\u062a\u062c\u0627\u0647 (101) \u0644\u0644\u0623\u063a\u0634\u064a\u0640\u0629 \u0627\u0644\u0645\u062d\u0636\u0651\u0631\u0629 \u0643\u0627\u0641\u0629\u060c \u0648\u0643\u0627\u0646 \u0645\u0639\u062f\u0644 \u0627\u0644\u062d\u062c\u0645 \u0627\u0644\u0628\u0644\u0648\u0631\u064a \u0644\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0645\u0631\u0633\u0628\u0629 \u0639\u0644\u0649 \u0627\u0644\u0632\u062c\u0627\u062c\u00a0 \u0627\u0642\u0644 \u0645\u0646 \u0627\u0644\u0645\u0639\u062f\u0644 \u0627\u0644\u062d\u062c\u0645 \u0627\u0644\u0628\u0644\u0648\u0631\u064a \u0627\u0644\u0627\u063a\u0634\u064a\u0629 \u0627\u0644\u0645\u0631\u0633\u0628\u0629 \u0639\u0644\u0649 \u0643\u0644 \u0645\u0646 \u0642\u0627\u0639\u062f\u062a\u064a (ITO) \u0648(Si) \u0645\u0639 \u062a\u0646\u0627\u0642\u0635 \u0645\u0639\u0640\u062f\u0644 \u0627\u0644\u062d\u062c\u0645 \u0627\u0644\u0628\u0644\u0648\u0631\u064a \u0628\u0632\u064a\u0627\u062f\u0629 \u0646\u0633\u0628\u0629 \u0627\u0644\u062a\u0637\u0639\u064a\u0645 \u0644\u0644\u0642\u0648\u0627\u0639\u062f \u0643\u0627\u0641\u0629.<\/span><\/h4>\n

\u0641\u0636\u0644\u0627 \u0639\u0646 \u0646\u062a\u0627\u0626\u062c XRD\u060c \u0623\u0638\u0647\u0631\u062a \u0646\u062a\u0627\u0626\u062c \u0645\u062c\u0647\u0631 \u0627\u0644\u0642\u0648\u0629 \u0627\u0644\u0630\u0631\u064a\u0629 (AFM) \u0627\u0646 \u062c\u0645\u064a\u0639 \u0627\u0644\u0627\u063a\u0634\u064a\u0629 \u0627\u0644\u0645\u062d\u0636\u0631\u0629 \u062a\u0645\u062a\u0644\u0643 \u062a\u0648\u0632\u064a\u0639\u0627 \u0645\u062a\u062c\u0627\u0646\u0633\u0627 \u0644\u0644\u062d\u0628\u064a\u0628\u0627\u062a \u0648 \u062a\u0632\u062f\u0627\u062f \u062e\u0634\u0648\u0646\u0629 \u0627\u0644\u0633\u0637\u062d \u0645\u0639 \u0632\u064a\u0627\u062f\u0629 \u0646\u0633\u0628 \u0627\u0644\u062a\u0637\u0639\u064a\u0645 \u0648 \u062a\u0646\u0627\u0642\u0635 \u0627\u0644\u062d\u062c\u0645 \u0627\u0644\u062d\u0628\u064a\u0628\u064a. \u0623\u0648\u0636\u062d\u062a \u0642\u064a\u0627\u0633\u0627\u062a \u0627\u0644\u062e\u0648\u0627\u0635 \u0627\u0644\u0628\u0635\u0631\u064a\u0629 \u0628\u0627\u0646 \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0644\u0627\u062a \u0627\u0644\u0628\u0635\u0631\u064a\u0629 \u0643\u0627\u0646\u062a \u0645\u0628\u0627\u0634\u0631\u0629 \u0645\u0633\u0645\u0648\u062d\u0629\u00a0 \u0648\u0627\u0646 \u0642\u064a\u0645 \u0627\u0644\u0646\u0641\u0627\u0630\u064a\u0629 \u062a\u0642\u0644 \u0645\u0639 \u0632\u064a\u0627\u062f\u0629 \u0646\u0633\u0628\u0629 \u0627\u0644\u062a\u0637\u0639\u064a\u0645 \u00a0\u0628\u0627\u0644\u0645\u0646\u063a\u0646\u064a\u0632 ,\u0648\u0628\u0627\u0644\u062a\u0627\u0644\u064a \u0633\u0648\u0641 \u062a\u0632\u062f\u0627\u062f \u0627\u0644\u0627\u0645\u062a\u0635\u0627\u0635\u064a\u0629\u060c \u0648\u0627\u0646 \u0641\u062c\u0648\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0628\u0635\u0631\u064a\u0629 \u0644\u0643\u0644 \u0627\u0644\u0627\u063a\u0634\u064a\u0629 \u062a\u0642\u0644 \u0628\u0632\u064a\u0627\u062f\u0629 \u00a0\u0627\u0644\u062a\u0637\u0639\u064a\u0645, \u0648\u0623\u0646 \u0642\u064a\u0645\u0629 \u0641\u062c\u0648\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0628\u0635\u0631\u064a\u0629 \u00a0\u0643\u0627\u0646\u062a \u0628\u062d\u062f\u0648\u062f 3.6) eV) \u0644\u0644\u0627\u063a\u0634\u064a\u0629 \u0627\u0644\u0646\u0642\u064a\u0629 \u0648\u064a\u0645\u0643\u0646 \u0627\u0644\u062a\u062d\u0643\u0645 \u0628\u0647\u0627 \u0639\u0646 \u0637\u0631\u064a\u0642 \u0646\u0633\u0628\u0629 \u0627\u0644\u062a\u0637\u0639\u064a\u0645. \u0643\u0630\u0644\u0643 \u062a\u0645 \u062d\u0633\u0627\u0628 \u0645\u0639\u0627\u0645\u0644 \u0627\u0644\u0627\u0645\u062a\u0635\u0627\u0635 \u0648\u0645\u0639\u0627\u0645\u0644 \u0627\u0644\u062e\u0645\u0648\u062f \u0643\u062f\u0627\u0644\u0629 \u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0641\u0648\u062a\u0648\u0646.<\/span><\/h4>\n

\u00a0\u00a0\u00a0\u00a0 \u062a\u0636\u0645\u0646\u062a \u062f\u0631\u0627\u0633\u0629 \u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0644\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0645\u062d\u0636\u0631\u0629 \u0627\u0644\u062a\u0648\u0635\u064a\u0644\u064a\u0629 \u0627\u0644\u0645\u0633\u062a\u0645\u0631\u0629 \u0648\u062a\u0623\u062b\u064a\u0631 \u0647\u0648\u0644. \u0648\u0623\u0638\u0647\u0631\u062a \u0646\u062a\u0627\u0626\u062c \u0627\u0644\u062a\u0648\u0635\u064a\u0644\u064a\u0629 \u062d\u062f\u0648\u062b \u0622\u0644\u064a\u062a\u064a\u0646 \u0644\u0644\u0627\u0646\u062a\u0642\u0627\u0644 \u0627\u0644\u0627\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u060c \u0623\u064a \u0637\u0627\u0642\u0640\u062a\u064a \u062a\u0646\u0634\u064a\u0637. \u0648\u0628\u064a\u0646\u062a \u0646\u062a\u0627\u0626\u062c \u062a\u0623\u062b\u064a\u0631 \u0647\u0648\u0644 \u0623\u0646 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0643\u0627\u0641\u0629 \u0647\u064a \u0645\u0646 \u0627\u0644\u0646\u0648\u0639 (P-type)\u060c \u0648\u0627\u0646 \u062a\u0631\u0643\u064a\u0632 \u0627\u0644\u062d\u0627\u0645\u0644\u0627\u062a \u0648\u0627\u0644\u062a\u062d\u0631\u0643\u064a\u0629\u00a0 \u064a\u0632\u062f\u0627\u062f \u0643\u0644 \u0645\u0646\u0647\u0645\u0627 \u0628\u0632\u064a\u0627\u062f\u0629 \u0627\u0644\u062a\u0637\u0639\u064a\u0645 \u0648\u0627\u0646 \u0627\u0636\u0627\u0641\u0629 \u0627\u0644\u0645\u0646\u063a\u0646\u064a\u0632\u0644\u0647\u0627 \u0642\u0644\u0644 \u0645\u0646 \u062a\u0631\u0643\u064a\u0632 \u0627\u0644\u062d\u0627\u0645\u0644\u0627\u062a.<\/span><\/h4>\n

\u0644\u0642\u062f \u0648\u062c\u062f\u0646\u0627 \u0627\u0646 \u062a\u062d\u0633\u0633\u064a\u0629 \u0627\u0644\u0627\u063a\u0634\u064a\u0629\u00a0 \u0644\u0644\u063a\u0627\u0632\u064a\u0646 (CO2,H2) \u062a\u062e\u062a\u0644\u0641 \u0628\u0627\u062e\u062a\u0644\u0627\u0641 \u0646\u0648\u0639 \u0627\u0644\u0642\u0627\u0639\u062f\u0629 \u0648\u0646\u0633\u0628 \u0627\u0644\u062a\u0637\u0639\u064a\u0645, \u0648\u0642\u062f \u0648\u062c\u062f \u0627\u0646 \u0627\u0644\u0627\u063a\u0634\u064a\u0629 \u062a\u0645\u062a\u0644\u0643 \u062a\u062d\u0633\u0633\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0644\u063a\u0627\u0632 \u0627\u0644\u0647\u064a\u062f\u0631\u0648\u062c\u064a\u0646 \u0641\u064a \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629 .\u0627\u0645\u0627 \u063a\u0627\u0632 \u062b\u0646\u0627\u0626\u064a \u0627\u0648\u0643\u0633\u064a\u062f \u0627\u0644\u0643\u0627\u0631\u0628\u0648\u0646 \u0641\u0642\u062f \u0643\u0627\u0646\u062a \u062a\u062d\u0633\u0633\u064a\u0629 \u0627\u0644\u0627\u063a\u0634\u064a\u0629 \u0644\u0647 \u0642\u0644\u064a\u0644\u0629 \u0641\u064a \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629 \u0648\u0644\u0630\u0644\u0643 \u062a\u062a\u062d\u0633\u0646 \u062a\u062d\u0633\u0633\u064a\u0629 \u0627\u0644\u0627\u063a\u0634\u064a\u0629 \u0644\u063a\u0627\u0632 \u062b\u0646\u0627\u0626\u064a \u0627\u0648\u0643\u0633\u064a\u062f \u0627\u0644\u0643\u0627\u0631\u0628\u0648\u0646 \u0628\u0648\u062c\u0648\u062f \u0627\u0644\u062d\u0631\u0627\u0631\u0629 (100\u00b0C).<\/span><\/h4>\n
\n

Synthesis and Study Pure and Doped TiO2 Nano structure Using R.F Sputtering for Gas Sensing Application<\/span><\/h3>\n

By Seham Hassan Salman<\/span><\/h3>\n

Supervised by Alia AbdulMouhsen Shihab<\/span><\/h3>\n

The Abstract<\/span><\/h3>\n

\u00a0In this research, the titanium dioxide (TiO2) thin films have been prepared by RF sputtering on glass, ITO and Si substrates, with thicknesses (250\u00b110) nm at 100\u00b0C substrate temperature. The films had doped with manganese (Mn) with different doping ratios (3,5,7) % and annealing range () for an hour of time under vacuum. The structural, optical, electrical, and gas sensing properties of (TiO2) have been studied. The structural properties of the deposited films were made using XRD, SEM and AFM.<\/span><\/h3>\n

The results of the XRD measurements showed that all the prepared thin films were amorphouse before annealing and after annealing at a temperature of 600 \u00b0 C became polycrystalline structure with a preferred orientation along (101) plane for entire prepared thin films .The crystalline size of thin films on the glass was less than the average crystalline size of the thin films on both the ITO and Si substrates, with the decrease in the crystalline size by increasing the rate of doping for all substrate<\/span><\/h3>\n

In addition to XRD results, the results of the Atomic Force Microscopy (AFM) showed that all the prepared thin films have a homogeneous distribution of grains. The surface roughness increases with increased the doping increased the particle size decreased<\/span><\/h3>\n

The optical properties measurements showed that the optical transitions were directly allowed. The transmittance values decreased with the increase in the percentage of manganese inoculation and thus, the absorption increased\u00a0<\/span><\/h3>\n

The optical energy gap for all the thin films decreased with the addition of the doping. The value of the optical gap energy is (3.65 eV) for the pure thin film and can be controlled by the ratio of doping. The absorption coefficient and Extinction coefficient ware also calculated as a function of photon energy\u00a0<\/span><\/h3>\n

The study included the study of the electrical properties of the DC conductivity of thin films and the Hall Effect. The \u00a0results of the conductivity showed two mechanisms for electronic transitions; two activation energies. The results of the Hall Effect showed that the whole films were P-type. And the mobility increased with the increase of concentration of manganese. Moreover, the addition of manganese reduced the resistivity of thin films<\/span><\/h3>\n

We found that the sensitivity of the thin films (TiO2) to the gases (CO2, H2) varies according to the type of substrate and the rates of doping. The thin films were found to have high sensitivity to hydrogen gas at room temperature. Carbon dioxide gas was very low sensitive to the thin films at room temperature and improved the sensitivity of the thin films to gas Carbon dioxide with heat (100) \u00b0C<\/span><\/h3>\n","protected":false},"excerpt":{"rendered":"

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